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what i use is a piece of glass as a surface to lap on, i usually go in circles until i have only copper exposed and then move to higher grit sandpaper until i am up to about 2k grit. the only way to make sure your hsf is flat is to lap it on a completely flat surface AKA glass.
also is is a good idea to put masking tape on your cpu's bottom.
also is is a good idea to put masking tape on your cpu's bottom.